Integrated Circuit or Semiconductor
Emissions of CF4, C2F6, C3F8, c-C4F8, C4F6, C4F8O, C5F8, CHF3, CH2F2, NF3 and SF6 from uses of these gases in Integrated Circuit (IC) manufacturing in rapidly evolving ways and in varying amounts, which depend on product (e.g., memory or logic devices) and equipment manufacturer.
Also known as: 2E1
Hierarchy
Section titled “Hierarchy”Broader: Electronics Industry
Details
Section titled “Details”| Property | Value |
|---|---|
| belongsToLevel | Category |
| notation | 2.E.1 |
Source: https://www.ipcc-nggip.iges.or.jp/efdb/find_ef.php?ipcc_code=2.E.1
Technical details
- IRI:
https://spec.decarbnexus.com/taxonomy/EMI/IPCC/2006/C2_E_1 - Kind: Taxonomy Concept